MadMotor – a UHV-compatible piezo-driven micropositioning system from Mad City Labs

The MadMotor™-UHV is a piezo motor driven micropositioning system offering high precision alignment over long travel ranges under ultra high vacuum (UHV) conditions. UHV compatible: 1 x 10-11 mbar 10 mm range of motion 100 nm step size (minimum) Bakeable to 150 °C Available in X, XY and XYZ configurations Up to 6 kg load Mad City Labs‘ experience in manufacturing equipment for use in UHV ensures that the MadMotor™-UHV is vacuum compatible to 1 x 10-11 mbar and can withstand extensive periods of baking at up to 150 °C.

The rigorous requirements of UHV operation have ensured careful design of the MadMotor™-UHV stages by the Mad City Labs engineering team to deliver robust and reliable operation within your application.

MadMotor™-UHV stages can travel up to 10 mm per axis with high resolution and excellent repeatability, while optional eddy current sensors can provide 500 nm of sensitivity over the entire travel range. A complete system is supplied as a 1, 2 or 3-axis piezo motor driven stage and Mad-Drive™ controller.

Please contact us for more details.